JPH0282770U - - Google Patents

Info

Publication number
JPH0282770U
JPH0282770U JP16015088U JP16015088U JPH0282770U JP H0282770 U JPH0282770 U JP H0282770U JP 16015088 U JP16015088 U JP 16015088U JP 16015088 U JP16015088 U JP 16015088U JP H0282770 U JPH0282770 U JP H0282770U
Authority
JP
Japan
Prior art keywords
vacuum processing
chamber
pressure seal
seal section
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16015088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16015088U priority Critical patent/JPH0282770U/ja
Publication of JPH0282770U publication Critical patent/JPH0282770U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16015088U 1988-12-09 1988-12-09 Pending JPH0282770U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16015088U JPH0282770U (en]) 1988-12-09 1988-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16015088U JPH0282770U (en]) 1988-12-09 1988-12-09

Publications (1)

Publication Number Publication Date
JPH0282770U true JPH0282770U (en]) 1990-06-26

Family

ID=31441968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16015088U Pending JPH0282770U (en]) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH0282770U (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0379987A (ja) * 1989-08-23 1991-04-04 Ulvac Japan Ltd 差動排気形真空処理装置
JP2001214275A (ja) * 2000-01-28 2001-08-07 Tdk Corp プラズマ処理装置
JP2011006737A (ja) * 2009-06-25 2011-01-13 Hitachi Zosen Corp 真空成膜装置及び真空成膜方法
JP2011042848A (ja) * 2009-08-24 2011-03-03 Fujifilm Corp 成膜装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0379987A (ja) * 1989-08-23 1991-04-04 Ulvac Japan Ltd 差動排気形真空処理装置
JP2001214275A (ja) * 2000-01-28 2001-08-07 Tdk Corp プラズマ処理装置
JP2011006737A (ja) * 2009-06-25 2011-01-13 Hitachi Zosen Corp 真空成膜装置及び真空成膜方法
JP2011042848A (ja) * 2009-08-24 2011-03-03 Fujifilm Corp 成膜装置

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